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Access to IISc Research and Development Facilities

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E-Beam and Thermal Evaporator

HHV ( Hind High Vacuum Company Pvt Ltd )

E-beam evaporation is used to deposit a wide variety of materials.

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6" Mask Aligner and Exposure System

MDA-400M-6

This highly accurate system allows researchers to easily develop their processes on wafers up to 6"

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Sputtering – DC & RF

HHV ( Hind High Vacuum Company Pvt Ltd )

500mm coating systems for research and production applications

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Class-1000 Lithography Cleanroom Facility

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Wet Bench

(Acid and Solvents)

Chemical Wet bench Acids is used for Piranha Cleaning/ HF dip/ Metal/Metal oxide etching of LEVEL 4 samples coming from lithography or other level 4 equipment's

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Oxygen plasma system

Etching and cleaning surfaces or for surface activation processes.

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HB16 Wire Bonder

Making interconnections between an integrated circuit (IC) or other semiconductor device and its packaging during

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Impedance Analyzer (GWINSTEK)

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Data Acquisition, and Logging system,

DAQ6510, (KEITHLEY)

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Function Generator

(GWINSTEK)

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Digital Stereo Microscope

3D printer

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Micromanipulator

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